Reference : Finite element modelling of electrostatic MEMS including the impact of fringing field ef...
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/83256
Finite element modelling of electrostatic MEMS including the impact of fringing field effects on forces
English
Boutaayamou, Mohamed mailto [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Capteurs et systèmes de mesures électriques >]
Nair, Harish [> >]
V Sabariego, Ruth mailto [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE) >]
Dular, Patrick mailto [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE) >]
2006
Proceedings of the 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE2006)
IEEE
Yes
International
1-4244-0275-1
7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE2006)
[en] electrostatic actuators ; electrostatics ; finite element analysis
[en] The numerical models describing the behaviour of electrostatically actuated microsystems often disregard fringing fields. However, taking the fringing fields into account is crucial for an accurate computation of the electrostatic forces. In this work, the finite element method is applied for modeling electrostatic actuators. The electrostatic force distribution is obtained by locally applying the virtual work method. A micro-beam and a comb drive are considered as test cases. The impact of the fringing field effects on the accuracy of electrostatic forces is shown through 2D and 3D parametric studies.
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/83256
10.1109/ESIME.2006.1643959
http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1643959

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