Reference : Finite element modelling of electrostatic MEMS including the impact of fringing field ef...

	Document type :	Scientific congresses and symposiums : Paper published in a book
	Discipline(s) :	Engineering, computing & technology : Electrical & electronics engineering
	To cite this reference:	http://hdl.handle.net/2268/83256

Title :	Finite element modelling of electrostatic MEMS including the impact of fringing field effects on forces
Language :	English
Author, co-author :	Boutaayamou, Mohamed [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Capteurs et systèmes de mesures électriques >]
	Nair, Harish [> >]
	V Sabariego, Ruth [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE) >]
	Dular, Patrick [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE) >]
Publication date :	2006
Main document title :	Proceedings of the 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE2006)
Publisher :	IEEE
Audience :	International
ISBN :	1-4244-0275-1
Event name :	7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE2006)
Keywords :	[en] electrostatic actuators ; electrostatics ; finite element analysis
Abstract :	[en] The numerical models describing the behaviour of electrostatically actuated microsystems often disregard fringing fields. However, taking the fringing fields into account is crucial for an accurate computation of the electrostatic forces. In this work, the finite element method is applied for modeling electrostatic actuators. The electrostatic force distribution is obtained by locally applying the virtual work method. A micro-beam and a comb drive are considered as test cases. The impact of the fringing field effects on the accuracy of electrostatic forces is shown through 2D and 3D parametric studies.
Target :	Researchers ; Professionals ; Students
Permalink :	http://hdl.handle.net/2268/83256
DOI :	10.1109/ESIME.2006.1643959
Other URL :	http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1643959

	File(s) associated to this reference
	Fulltext file(s): File Commentary Version Size Access Restricted access 06_eurosime06_bootaayamou_fringingfields.pdf Publisher postprint 3.94 MB Request copy

All documents in ORBi are protected by a user license.

 

© ULg Library Network |  Feedback |  ORBi legal notices

Dspace v1.5