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Finite element modelling of electrostatic MEMS including the impact of fringing field effects on forces
Boutaayamou, Mohamed; Nair, Harish; V Sabariego, Ruth et al.
2006 • In Proceedings of the 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE2006)

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06_eurosime06_bootaayamou_fringingfields.pdf

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