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A Perturbation Method for the 3D Finite Element Modeling of Electrostaticaly Driven MEMS
Boutaayamou, Mohamed; V Sabariego, Ruth; Dular, Patrick
2007 • In Proceedings of the 8th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems

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07eurosime_boutaayamou_perturbationMEMS.pdf

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