Reference : A Perturbation Method for the 3D Finite Element Modeling of Electrostaticaly Driven MEMS
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/83507
A Perturbation Method for the 3D Finite Element Modeling of Electrostaticaly Driven MEMS
English
Boutaayamou, Mohamed mailto [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Capteurs et systèmes de mesures électriques >]
V Sabariego, Ruth mailto [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE) >]
Dular, Patrick mailto [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE) >]
Apr-2007
Proceedings of the 8th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems
[en] Proceedings of EuroSimE2007
IEEE
IEEE Catalog Number: 07EX1736
50-54
Yes
International
1-4244-1105-X
8th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE2007)
April 16-18, 2007
London
Great Britain
[en] In this paper, a finite element (FE) procedure for modeling electrostatically actuated MEMS
is presented. It concerns a perturbation method for computing electrostatic field distortions due to moving conductors. The computation is split in two steps. First, an unperturbed problem (in the absence of certain conductors) is solved with the conventional FE method in the complete domain. Second, a perturbation problem is solved in a reduced region with an additional conductor using the solution of the unperturbed problem as a source. When the perturbing regions are close to the original source field, an iterative computation may be required. The developed procedure offers the advantage of solving sub-problems in reduced domains and consequently of benefiting from different problem-adapted meshes.
This approach allows for computational efficiency by decreasing the size of the problem.
http://hdl.handle.net/2268/83507
10.1109/ESIME.2007.359942
http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=4201139

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