ORBi: Boutaayamou Mohamed - A Perturbation Method for the 3D Finite Element Modeling of Electrostaticaly Driven MEMS

Reference : A Perturbation Method for the 3D Finite Element Modeling of Electrostaticaly Driven MEMS


	Document type :	Scientific congresses and symposiums : Paper published in a book
	Discipline(s) :	Engineering, computing & technology : Electrical & electronics engineering
	To cite this reference:	http://hdl.handle.net/2268/83507

Title :	A Perturbation Method for the 3D Finite Element Modeling of Electrostaticaly Driven MEMS
Language :	English
Author, co-author :	Boutaayamou, Mohamed [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Capteurs et systèmes de mesures électriques >]
	V Sabariego, Ruth [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE) >]
	Dular, Patrick [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE) >]
Publication date :	Apr-2007
Main document title :	Proceedings of the 8th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems
Alternative title :	[en] Proceedings of EuroSimE2007
Publisher :	IEEE
Collection and collection volume :	IEEE Catalog Number: 07EX1736
Pages :	50-54
Audience :	International
ISBN :	1-4244-1105-X
Event name :	8th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE2007)
Event date :	April 16-18, 2007
Event place (city) :	London
Event country :	Great Britain
Abstract :	[en] In this paper, a finite element (FE) procedure for modeling electrostatically actuated MEMS is presented. It concerns a perturbation method for computing electrostatic field distortions due to moving conductors. The computation is split in two steps. First, an unperturbed problem (in the absence of certain conductors) is solved with the conventional FE method in the complete domain. Second, a perturbation problem is solved in a reduced region with an additional conductor using the solution of the unperturbed problem as a source. When the perturbing regions are close to the original source field, an iterative computation may be required. The developed procedure offers the advantage of solving sub-problems in reduced domains and consequently of benefiting from different problem-adapted meshes. This approach allows for computational efficiency by decreasing the size of the problem.
Permalink :	http://hdl.handle.net/2268/83507
DOI :	10.1109/ESIME.2007.359942
Other URL :	http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=4201139

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