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High Vibration Sensors: Modelling, Design and Integration

Rochus, Véronique; Gutschmidt, Stefanie; Golinval, Jean-Claude et al.

2009 • In Proceedings of Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-systems EuroSime

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2009_Eurosime1.pdf

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