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A three degree-of-freedom weakly coupled resonator sensor with enhanced stiffness sensitivity.

Zhao, Chun; Wood, Graham; Xie, J.B. et al.

2015 • In Journal of Microelectromechanical Systems, 25 (1), p. 38-51

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IEEE JMEMS 3 DoF coupled resonator stiffness sensitivity Zhao.pdf

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IEEE JMEMS 3 DoF coupled resonator stiffness sensitivity Zhao.pdf

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