Article (Scientific journals)
A three degree-of-freedom weakly coupled resonator sensor with enhanced stiffness sensitivity.
Zhao, Chun; Wood, Graham; Xie, J.B. et al.
2015In Journal of Microelectromechanical Systems, 25 (1), p. 38-51
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Abstract :
[en] Abstract—This paper reports a three degree-of freedom (3DoF) microelectromechanical systems (MEMS) resonant sensing device consisting of three weakly coupled resonators with enhanced sensitivity to stiffness change. If one resonator of the system is perturbed by an external stimulus, mode localization occurs, which can be detected by a change of modal amplitude ratio. The perturbation can be, for example, a change in stiffness of one resonator. A detailed theoretical investigation revealed that a mode aliasing effect, along with the thermal noise floor of the sensor and the associated electrical system ultimately limit the dynamic range of the sensor. The nonlinearity of the 3DoF sensor was also analyzed theoretically. The 3DoF resonator device was fabricated using a silicon on insulator process. Measurement results from a prototype device agreed well with the predictions of the analytical model. A significant, namely 49 times, improvement in sensitivity to stiffness change was evident from the fabricated 3DoF resonator sensor compared with the existing state-of-the-art 2DoF resonator sensors, while the typical nonlinearity was smaller than ±2% for a wide span of stiffness change. In addition, measurements indicate that a dynamic range of at least 39.1 dB is achievable, which could be further extended by decreasing the noise of the device and the interface electronics.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Zhao, Chun
Wood, Graham
Xie, J.B.
Chang, Honglong
Pu, Suan
Kraft, Michael ;  Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
A three degree-of-freedom weakly coupled resonator sensor with enhanced stiffness sensitivity.
Publication date :
2015
Journal title :
Journal of Microelectromechanical Systems
ISSN :
1057-7157
eISSN :
1941-0158
Publisher :
IEEE
Volume :
25
Issue :
1
Pages :
38-51
Peer reviewed :
Peer Reviewed verified by ORBi
Available on ORBi :
since 17 May 2016

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