Nguyen, N. D, Wang, G, Brammertz, G, Leys, M, Waldron, N, Winderickx, G, Lismont, K, Dekoster, J, Loo, R, Meuris, M, Degroote, S, Buttita, F, O'Neil, B, Féron, O, Lindner, J, Schulte, F, Schineller, B, Heuken, M, & Caymax, M. (2010). Selective epitaxial growth of III-V semiconductor heterostructures on Si substrates for logic applications. ECS Transactions, 33, 933.
We have deposited III-V alloys on 200 mm Si miscut wafers with an oxide pattern. The selective epitaxial growth (SEG) of GaAs in large windows defined by SiO2 lines on a thick strained-relaxed Ge buffer layer ...