[en] The dynamic behaviour of paddle MEMS cantilever oscillators under electrostatic actuation is
investigated and presented in this paper. The scope is to estimate the influence of the geometrical dimensions and operating conditions on the frequency response of mechanical paddle cantilevers fabricated from polysilicon. Theoretical approach and finite element analysis are developed considering the multiphysics coupling between the electrical field and the mechanical structure of oscillators. The;experimental tests are performed under ambient condition and in vacuum in order to characterize the effect of operating condition on the frequency response of paddle cantilevers.