ORBi: Pustan Marius - Dynamic investigations of paddle MEMS cantilevers used in mass sensing applications

Reference : Dynamic investigations of paddle MEMS cantilevers used in mass sensing applications


	Document type :	Scientific congresses and symposiums : Paper published in a book
	Discipline(s) :	Engineering, computing & technology : Mechanical engineering
	To cite this reference:	http://hdl.handle.net/2268/99753

Title :	Dynamic investigations of paddle MEMS cantilevers used in mass sensing applications
Language :	English
Author, co-author :	Pustan, Marius [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
	Belcin, Oliviu [Technical University of Cluj-Napoca > Department of Machine Elements and Tribology > > >]
	Golinval, Jean-Claude [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Publication date :	2011
Main document title :	Acta Technica Napocensis of The Technical University of Cluj-Napoca
Director :	Arghir, Mariana
Collection and collection volume :	Vol. 54, Issue PSD, Series: Applied Mathematics and Mechanics
Pages :	117-122
On invitation :	Yes
Audience :	International
ISBN :	1221-5872
City :	Cluj-Napoca
Country :	Romania
Event name :	The 3rd International Conference on Advanced Engineering in Mechanical Systems (ADEMS'11)
Event date :	du 21 septembre 2011 au 23 septembre 2011
Event organizer :	Technical University of Cluj-Napoca
Event place (city) :	Cluj-Napoca
Event country :	Romania
Keywords :	[en] Mechanical oscillators ; frequency response ; electrostatic actuation ; multiphysics coupling
Abstract :	[en] The dynamic behaviour of paddle MEMS cantilever oscillators under electrostatic actuation is investigated and presented in this paper. The scope is to estimate the influence of the geometrical dimensions and operating conditions on the frequency response of mechanical paddle cantilevers fabricated from polysilicon. Theoretical approach and finite element analysis are developed considering the multiphysics coupling between the electrical field and the mechanical structure of oscillators. The;experimental tests are performed under ambient condition and in vacuum in order to characterize the effect of operating condition on the frequency response of paddle cantilevers.
Target :	Researchers ; Professionals
Permalink :	http://hdl.handle.net/2268/99753

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	File	Commentary	Version	Size	Access
Open access	L21 p 117-122.pdf		Publisher postprint	460.18 kB	View/Open

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