Reference : Dynamic investigations of paddle MEMS cantilevers used in mass sensing applications
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Mechanical engineering
http://hdl.handle.net/2268/99753
Dynamic investigations of paddle MEMS cantilevers used in mass sensing applications
English
Pustan, Marius [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Belcin, Oliviu mailto [Technical University of Cluj-Napoca > Department of Machine Elements and Tribology > > >]
Golinval, Jean-Claude mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
2011
Acta Technica Napocensis of The Technical University of Cluj-Napoca
Arghir, Mariana
Vol. 54, Issue PSD, Series: Applied Mathematics and Mechanics
117-122
No
Yes
International
1221-5872
Cluj-Napoca
Romania
The 3rd International Conference on Advanced Engineering in Mechanical Systems (ADEMS'11)
du 21 septembre 2011 au 23 septembre 2011
Technical University of Cluj-Napoca
Cluj-Napoca
Romania
[en] Mechanical oscillators ; frequency response ; electrostatic actuation ; multiphysics coupling
[en] The dynamic behaviour of paddle MEMS cantilever oscillators under electrostatic actuation is
investigated and presented in this paper. The scope is to estimate the influence of the geometrical dimensions and operating conditions on the frequency response of mechanical paddle cantilevers fabricated from polysilicon. Theoretical approach and finite element analysis are developed considering the multiphysics coupling between the electrical field and the mechanical structure of oscillators. The;experimental tests are performed under ambient condition and in vacuum in order to characterize the effect of operating condition on the frequency response of paddle cantilevers.
Researchers ; Professionals
http://hdl.handle.net/2268/99753

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