Reference : Enhancement of the poly/mono growth rate ratio for BiCMOS application
Reports : Internal report
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/98542
Enhancement of the poly/mono growth rate ratio for BiCMOS application
English
Nguyen, Ngoc Duy mailto [IMEC > > > >]
Loo, Roger [IMEC > > > >]
2008
IMEC
PR07.0308
[en] Growth rate ; Epitaxial growth ; BiCMOS
Professionals
http://hdl.handle.net/2268/98542

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