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Internal report (Reports)
Enhancement of the poly/mono growth rate ratio for BiCMOS application
Nguyen, Ngoc Duy
;
Loo, Roger
2008
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https://hdl.handle.net/2268/98542
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Keywords :
Growth rate; Epitaxial growth; BiCMOS
Disciplines :
Electrical & electronics engineering
Author, co-author :
Nguyen, Ngoc Duy
;
IMEC
Loo, Roger;
IMEC
Language :
English
Title :
Enhancement of the poly/mono growth rate ratio for BiCMOS application
Publication date :
2008
Publisher :
IMEC
Report number :
PR07.0308
Available on ORBi :
since 09 September 2011
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