|Reference : Enhancement of the poly/mono growth rate ratio for BiCMOS application|
|Reports : Internal report|
|Engineering, computing & technology : Electrical & electronics engineering|
|Enhancement of the poly/mono growth rate ratio for BiCMOS application|
|Nguyen, Ngoc Duy [IMEC > > > >]|
|Loo, Roger [IMEC > > > >]|
|[en] Growth rate ; Epitaxial growth ; BiCMOS|
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