ORBi: Nguyen Ngoc Duy - Enhancement of the poly/mono growth rate ratio for BiCMOS application

Reference : Enhancement of the poly/mono growth rate ratio for BiCMOS application


	Document type :	Reports : Internal report
	Discipline(s) :	Engineering, computing & technology : Electrical & electronics engineering
	To cite this reference:	http://hdl.handle.net/2268/98542

Title :	Enhancement of the poly/mono growth rate ratio for BiCMOS application
Language :	English
Author, co-author :	Nguyen, Ngoc Duy [IMEC > > > >]
	Loo, Roger [IMEC > > > >]
Publication date :	2008
Publisher :	IMEC
Report number :	PR07.0308
Keywords :	[en] Growth rate ; Epitaxial growth ; BiCMOS
Target :	Professionals
Permalink :	http://hdl.handle.net/2268/98542

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