Reference : Heavy n-type doping of SiGe for SIMS calibration
Reports : Internal report
Engineering, computing & technology : Materials science & engineering
http://hdl.handle.net/2268/98537
Heavy n-type doping of SiGe for SIMS calibration
English
Nguyen, Ngoc Duy mailto [IMEC > > > >]
2007
PR06.0496
[en] Heavy n-type doping ; SiGe ; CVD
Researchers ; Professionals
http://hdl.handle.net/2268/98537

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