ORBi: Nguyen Ngoc Duy - Heavy n-type doping of SiGe for SIMS calibration

Reference : Heavy n-type doping of SiGe for SIMS calibration


	Document type :	Reports : Internal report
	Discipline(s) :	Engineering, computing & technology : Materials science & engineering
	To cite this reference:	http://hdl.handle.net/2268/98537

Title :	Heavy n-type doping of SiGe for SIMS calibration
Language :	English
Author, co-author :	Nguyen, Ngoc Duy [IMEC > > > >]
Publication date :	2007
Report number :	PR06.0496
Keywords :	[en] Heavy n-type doping ; SiGe ; CVD
Target :	Researchers ; Professionals
Permalink :	http://hdl.handle.net/2268/98537

There is no file associated with this reference.

All documents in ORBi are protected by a user license.