Reference : Effects of the electrode positions on the dynamical behaviour of electrostatically ac...
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Aerospace & aeronautics engineering
http://hdl.handle.net/2268/90109
Effects of the electrode positions on the dynamical behaviour of electrostatically actuated MEMS resonators
English
Pustan, Marius [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Paquay, Stéphane mailto [Open Engineering SA > > > >]
Rochus, Véronique mailto [IMEC Leuven, Belgium > > > >]
Golinval, Jean-Claude mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
18-Apr-2011
Yes
International
12th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE
April 18-20, 2011.
Linz
Austria
[en] MEMS resonator ; Q- factor ; dynamic response
[en] The influence of the lower electrode positions on the dynamic response of polysilicon MEMS resonators is studied and presented in this paper. The change in the frequency response of investigated MEMS resonators as function of the lower electrode positions is measured using a vibrometer analyzer. The decrease in the amplitude and velocity of oscillations if the lower electrode is moved from the beam free-end toward to the
beam anchor is experimental monitored. The measurements are performed in ambient conditions in order to characterize the forced-response Q-factor of samples. A decrease of the Q- factor if the lower electrode is moved toward to the beam anchor is experimental determined. Different responses of MEMS resonators may be obtained if the position of the lower electrode is modified. Indeed the resonator stiffness, velocity and amplitude of oscillations are changed.
Division de la Recherche et de la Coopération Scientifique
Ministère de la Région Wallonne
Programme FIRST Post-Doc (Project MOMIVAL)
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/90109

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