Reference : Modeling and finite element analysis of mechanical behavior of flexible MEMS components
Scientific journals : Article
Engineering, computing & technology : Aerospace & aeronautics engineering
http://hdl.handle.net/2268/90108
Modeling and finite element analysis of mechanical behavior of flexible MEMS components
English
Pustan, Marius [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Paquay, Stéphane mailto [ > > ]
Rochus, Véronique mailto [ > > ]
Golinval, Jean-Claude mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
25-Apr-2011
Microsystem Technologies
Springer Science & Business Media B.V.
17
4
foreword to special issue on design, test, integration and packaging of MEMS/MOEMS, 2010
553-562
Yes (verified by ORBi)
International
0946-7076
[en] Flexible microcomponents ; Multilayer structures ; Elastic deformations ; Stiffness ; Stress
[en] This paper describes the studies of the mechanical characteristics of flexible MEMS components including theoretical approaches, finite element analysis and experimental investigations. Modeling and finite element analyses together with theoretical and experimental investigations are performed to estimate the elastic behavior of MEMS components as microcantilevers, microbridges and micromembranes. Finite element analysis of microcomponents deflections under different loading and the stress distribution in beams are determined and compared with the experimental measurements performed using an atomic force microscope. The modeling of a micromembrane supported by four hinges that enable out-of-plane motion is presented. Finite element analysis and experimental investigations are performed to visualize the deflection of the mobile part of the micromembrane under an applied force and the stress distribution in hinges. In additional, this paper provides analytical relations to compute the stiffness and the stress of the investigated flexible MEMS components.
Division de la Recherche et de la Coopération Scientifique
Ministère de la Région Wallonne
Programme FIRST Post-Doc (Project MOMIVAL)
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/90108
10.1007/s00542-011-1232-z

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