Reference : Mechanical properties of Al/Al2O3 nanolaminated films: correlation to microstructure
Scientific journals : Article
Engineering, computing & technology : Mechanical engineering
http://hdl.handle.net/2268/88138
Mechanical properties of Al/Al2O3 nanolaminated films: correlation to microstructure
English
Ben Daia, M. [>Laboratoire Multicouches Nanométriques (LMN), Université d’Evry, Bd F. Mitterand, 91023 Evry cedex, France > > > > > >]
Aubert, P. [>Laboratoire Multicouches Nanométriques (LMN), Université d’Evry, Bd F. Mitterand, 91023 Evry cedex, France > > > > > >]
Labdi, S. [>Laboratoire Multicouches Nanométriques (LMN), Université d’Evry, Bd F. Mitterand, 91023 Evry cedex, France > > > > > >]
Le Paven-Thivet, C. [>Laboratoire Multicouches Nanométriques (LMN), Université d’Evry, Bd F. Mitterand, 91023 Evry cedex, France > > > > > >]
Houdy, P. [>Laboratoire Multicouches Nanométriques (LMN), Université d’Evry, Bd F. Mitterand, 91023 Evry cedex, France > > > > > >]
Bozet, Jean-Luc mailto [Université de Liège > Département de chimie appliquée > Chimie appliquée - Cryotribologie >]
2000
Surface & Coatings Technology
Elsevier Science
125
1-3
196-200
Yes (verified by ORBi)
International
0257-8972
Lausanne
Switzerland
[en] Al/Al2O3 multilayers ; Nanoindentation ; Tribological properties
[en] Wear resistance and the hardness of Al/Al2O3 nanolaminated films were investigated in this study. Monolithic films and multilayers were deposited on a silicon substrate with two different substrate temperatures: T-s= 25 degrees C and T-s= -90 degrees C. The period thickness of multilayers was lowering from 40 to 2 nm. From nanoindentation measurements, it appears that the hardness of multilayers has an intermediate value between those of metal (Al) and ceramic (Al2O3). The tribological test was conducted by the pin-on-disc method. The T-s=25 degrees C deposited multilayers, as well as single films, demonstrated poor wear resistance. The best wear resistance was obtained for multilayers deposited at the lowest substrate temperature (T-s= -90 degrees C). The results are ill good agreement with structural characterization. X-ray reflectometry demonstrated that the multilayer character of Al/Al2O3 is more pronounced for T-s= -90 degrees C. (C) 2000 Elsevier Science S.A. All rights reserved.
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/88138

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