Reference : Nanoindentation investigation of Ti/TiN multilayers films
Scientific journals : Article
Engineering, computing & technology : Mechanical engineering
http://hdl.handle.net/2268/88137
Nanoindentation investigation of Ti/TiN multilayers films
English
Ben Daia, M. [>Laboratoire Multicouches Nanométriques (LMN), Université d'Evry Val d'Essonne, Bd F. Mitterrand, 91025 Evry cedex, France > > > > > >]
Aubert, P. [>Laboratoire Multicouches Nanométriques (LMN), Université d'Evry Val d'Essonne, Bd F. Mitterrand, 91025 Evry cedex, France > > > > > >]
Labdi, S. [>Laboratoire Multicouches Nanométriques (LMN), Université d'Evry Val d'Essonne, Bd F. Mitterrand, 91025 Evry cedex, France > > > > > >]
Sant, C. [>Laboratoire Multicouches Nanométriques (LMN), Université d'Evry Val d'Essonne, Bd F. Mitterrand, 91025 Evry cedex, France > > > > > >]
Sadi, F. A. [>Laboratoire Multicouches Nanométriques (LMN), Université d'Evry Val d'Essonne, Bd F. Mitterrand, 91025 Evry cedex, France > > > > > >]
Houdy, Ph. [>Laboratoire Multicouches Nanométriques (LMN), Université d'Evry Val d'Essonne, Bd F. Mitterrand, 91025 Evry cedex, France > > > > > >]
Bozet, Jean-Luc mailto [Université de Liège > Département de chimie appliquée > Chimie appliquée - Cryotribologie >]
2000
Journal of Applied Physics
American Institute of Physics
87
11
7753-7757
Yes (verified by ORBi)
International
0021-8979
Melville
NY
[en] titanium ; titanium compounds ; Young's modulus ; nanostructured materials ; indentation ; X-ray reflection ; sputtered coatings ; multilayers ; hardness
[en] The hardness of Ti/TiN nanolaminated films is investigated in this study. Monolithic Ti and TiN films and Ti/TiN multilayers were deposited on silicon substrates by radio-frequency sputtering. The period thickness of multilayers was decreased from 20 to 2.5 nm. Grazing x-ray reflectometry showed that the modulation of composition of Ti/TiN multilayers exists for all the period thickness considered. From nanoindentation measurements, we determined the hardness and Young's modulus of multilayers. Hardness increased with decreasing period thickness to go beyond the rule-of-mixture value for samples with period thickness of Lambda less than or equal to 5 nm. The maximum hardness, 1.6 times higher than the value obtained by the rule of mixture, is obtained for Lambda=2.5 nm. Our results are compared to a dislocation-based model previously introduced by Lehoczky. (C) 2000 American Institute of Physics. [S0021-8979(00)09411-1].
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/88137
10.1063/1.373450

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