Reference : Modeling and Finite Element Analysis of Mechanical Behavior of Flexible MEMS Components
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Mechanical engineering
http://hdl.handle.net/2268/72012
Modeling and Finite Element Analysis of Mechanical Behavior of Flexible MEMS Components
English
Pustan, Marius [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Paquay, Stéphane mailto [Open Engineering SA Belgium > > > >]
Rochus, Véronique mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Golinval, Jean-Claude mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
5-May-2010
2010
DTIP 2010
[en] IEEE Catalog Number CFP10DTI-PRT
Courtois, Bernard mailto
EDA Publishing
Catalog Number CFP10DTI-PRT
171-176
No
Yes
International
978-2-35500-011-9
Grenoble
France
Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS
from 05-05-2010 to 07-05-2010
IEEE Components, Packaging and Manufacturing Technology Society and Circuits Multi-Projects
Seville
Spain
[en] Flexible microcomponents ; Multilayer structures ; Stress and Strain
[en] This paper describes the studies of the mechanical characteristics of flexible MEMS components including theoretical approach, finite element analysis and experimental investigations. Modeling and finite element analyses together with theoretical and experimental investigations are performed to estimate the mechanical behaviour of MEMS components as microcantilevers, microbridges and micromembranes. The finite element analysis of microcomponents deflections under different loading and the stress distribution in beams is determined and compared with the experimental measurements performed using atomic force microscope. The modeling of a micromembrane supported by four hinges that enable out-of-plane and in-plane motions is presented. Finite element analysis and experimental investigations are performed to estimate the deflection of the mobile plate of the micromembrane under an applied force and to visualize the distribution of the stress in hinges. In additional, this paper provides analytical relations for stiffness and stresses of the investigated flexible MEMS components.
Université de Liège, Département Aérospatiale et Mécanique
Ministère de la Région Wallonne, Division de la Recherche et de la Coopération Scientifique in the framework Programme FIRST Post-Doc
Project MOMIVAL
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/72012

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