Reference : Geometrical Effects on the Dynamical Behavior of MEMS structures
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Mechanical engineering
http://hdl.handle.net/2268/71501
Geometrical Effects on the Dynamical Behavior of MEMS structures
English
Pustan, Marius [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Golinval, Jean-Claude mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Rochus, Véronique mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
16-May-2010
Yes
Yes
International
European Conference on Computational Mechanics (ECCM 2010)
May 16-21, 2010
ECCOMAS - European Community on Computational Methods in Applied Sciences
Paris
France
[en] Cyclical loading ; Fatigue failure ; Frequency responses
[en] The influence of geometrical dimensions on the dynamical behavior of polysilicon MEMS structures configurations is studied and presented in this paper. Electrostatically actuated MEMS components as microbridges and microcantilevers are used to investigate the coupled electro-mechanic effect, frequency responses and the dynamic bending stress. The electrostatic principle is common in sensing and acting devices and there are many MEMS structures subjected to electrostatic forces.
Université de Liège, Département Aérospatiale et Mécanique ; Technical University of Cluj-Napoca, Department of Machine Elements and Tribology
Ministère de la Région Wallonne, Division de la Recherche et de la Coopération Scientifique in the framework Programme FIRST Post-Doc
Project MOMIVAL
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/71501

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