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Epitaxial Si, SiGe and Ge for high-performance devices
Loo, Roger; Hikavyy, Andriy; Vincent, Benjamin et al.
2010ASM User Meeting
 

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Keywords :
Epitaxy; CVD; Si; Ge; SiGe; High-performance device
Disciplines :
Materials science & engineering
Author, co-author :
Loo, Roger;  IMEC
Hikavyy, Andriy;  IMEC
Vincent, Benjamin;  IMEC
Wang, Gang;  IMEC
Vanherle, Wendy;  IMEC
Gencarelli, Federica;  IMEC
Nguyen, Ngoc Duy  ;  Université de Liège - ULiège > Département de physique > Physique des solides, interfaces et nanostructures
Rosseel, Erik;  IMEC
Souriau, Laurent;  IMEC
Rondas, Dirk;  IMEC
Dekoster, Johan;  IMEC
Caymax, Matty;  IMEC
Language :
English
Title :
Epitaxial Si, SiGe and Ge for high-performance devices
Publication date :
23 September 2010
Event name :
ASM User Meeting
Event organizer :
ASM
Event place :
Munich, Germany
Event date :
23/09/2010
By request :
Yes
Audience :
International
Available on ORBi :
since 07 September 2010

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