Unpublished conference/Abstract (Scientific congresses and symposiums)Si$_1-x$Ge$_x$ growth using Si$_3$H$_8$ by low temperature chemical vapor deposition
Takeuchi, Shotaro; Nguyen, Ngoc Duy; Goossens, Jozefien et al.
2009 • 6th International Conference on Silicon Epitaxy and Heterostructures