Reference : SiGe tunnel field effect transistors: challenges for selective epitaxial growth

	Document type :	Scientific congresses and symposiums : Unpublished conference
	Discipline(s) :	Engineering, computing & technology : Materials science & engineering
	To cite this reference:	http://hdl.handle.net/2268/69196

Title :	SiGe tunnel field effect transistors: challenges for selective epitaxial growth
Language :	English
Author, co-author :	Loo, Roger [IMEC > > > > > >]
	Iacopi, Francesca [IMEC > > > > > >]
	Vanherle, Wendy [IMEC > > > > > >]
	Rooyackers, Rita [IMEC > > > > > >]
	Vandooren, Anne [IMEC > > > > > >]
	Takeuchi, Shotaro [IMEC > > > > > >]
	Nguyen, Ngoc Duy [IMEC > > > >]
	Doornbos, Gernd [IMEC > > > > > >]
	De Gendt, Stefan [Katholieke Universiteit Leuven - KUL and IMEC > > > > > >]
Publication date :	2009
Peer reviewed :	Yes
Audience :	International
Event name :	MRS Spring Meeting, 2009
Event date :	13-17/4/2009
Event organizer :	MRS
Event place (city) :	San Francisco
Event country :	USA
Keywords :	[en] SiGe ; Tunnel FET ; Selective epitaxial growth
Target :	Researchers ; Professionals
Permalink :	http://hdl.handle.net/2268/69196

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