Reference : Depth resolution and surface transients in crystalline Silicon at ultra low energies
Scientific congresses and symposiums : Poster
Engineering, computing & technology : Materials science & engineering
http://hdl.handle.net/2268/69117
Depth resolution and surface transients in crystalline Silicon at ultra low energies
English
Goossens, Jozefien [IMEC > > > >]
Berghmans, Bart [IMEC > > > >]
Franquet, Alexis [IMEC > > > >]
Nguyen, Ngoc Duy mailto [IMEC > > > >]
Delmotte, Joris [IMEC > > > >]
Geenen, Luc [IMEC > > > >]
Richard, Olivier [IMEC > > > >]
Bender, Hugo [IMEC > > > >]
Vandervorst, Wilfried [IMEC > > > >]
2009
Yes
No
International
17th International Conference on Secondary Ion Mass Spectrometry (SIMS XVII)
14-18/9/2009
Joe Gardella, Leo Lau and Rana Sodhi
Toronto
Canada
[en] Ultra low energy secondary ion mass spectrometry ; Depth resolution ; Surface transient
Researchers ; Professionals
http://hdl.handle.net/2268/69117
http://www.simsxvii.org/

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