In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffraction

Nguyen, Ngoc Duy; Loo, R.; Hikavyy, A.; Van Daele, B.; Ryan, P.; Wormington, M.; Hopkins, J.

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In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffraction

Nguyen, Ngoc Duy; Loo, R.; Hikavyy, A. et al.

2007 • Analytical Techniques for Semiconductor Materials and Process Characterization (ALTECH)

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Keywords :

In-line characterization; Heterojunction; Bipolar transistor; High-resolution X-ray diffraction

Disciplines :

Electrical & electronics engineering

Author, co-author :

Nguyen, Ngoc Duy ; IMEC

Loo, R.; IMEC

Hikavyy, A.; IMEC

Van Daele, B.; IMEC

Ryan, P.; IMEC

Wormington, M.; IMEC

Hopkins, J.; IMEC

Language :

English

Title :

In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffraction

Publication date :

2007

Event name :

Analytical Techniques for Semiconductor Materials and Process Characterization (ALTECH)

Event organizer :

University of Francfort

Event place :

Munich, Germany

Event date :

13-14/9/2007

Audience :

International

Additional URL :

https://dx.doi.org/10.1149/1.2773985

Available on ORBi :

since 13 August 2010

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