ORBi: Reiche M. - Strained silicon-on-insulator - Fabrication and characterization

Reference : Strained silicon-on-insulator - Fabrication and characterization


	Document type :	Scientific congresses and symposiums : Paper published in a book
	Discipline(s) :	Engineering, computing & technology : Materials science & engineering
	To cite this reference:	http://hdl.handle.net/2268/69097

Title :	Strained silicon-on-insulator - Fabrication and characterization
Language :	English
Author, co-author :	Reiche, M. [MPI für Mikrostrukturphysik > > > > > >]
	Himcinschi, C. [MPI für Mikrostrukturphysik > > > > > >]
	Gösele, U. [MPI für Mikrostrukturphysik > > > > > >]
	Christiansen, S. [MPI für Mikrostrukturphysik > > > > > >]
	Mantl, S. [Forschungszentrum Jülich > > > > > >]
	Buca, D. [Forschungszentrum Jülich > > > > > >]
	Zhao, Q. T. [Forschungszentrum Jülich > > > > > >]
	Feste, S. [Forschungszentrum Jülich > > > > > >]
	Loo, R. [IMEC > > > > > >]
	Nguyen, Ngoc Duy [IMEC > > > >]
	Buchholtz, W. [AMD Saxony > > > > > >]
	Wei, A. [AMD Saxony > > > > > >]
	Horstmann, M. [AMD Saxony > > > > > >]
	Feijoo, D. [Siltronic AG > > > > > >]
	Storck, P. [Siltronic AG > > > > > >]
Publication date :	2007
Main document title :	211th ECS Meeting, 2007
Publisher :	ECS
Collection and collection volume :	ECS Meeting Abstract MA2007-01
Peer reviewed :	Yes
Audience :	International
ISBN :	2151-2043
City :	Pennington
Country :	USA
Event name :	211th ECS Meeting
Event date :	6-10/5/2007
Event organizer :	ECS
Event place (city) :	Chicago
Event country :	USA
Keywords :	[en] Strained silicon-on-insulato ; Growth
Target :	Researchers ; Professionals
Permalink :	http://hdl.handle.net/2268/69097

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	File	Commentary	Version	Size	Access
Open access	Reiche_ECS_Spring_2007.pdf		Publisher postprint	121.11 kB	View/Open

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