IEEE Bipolar/BiCMOS Circuits and Technology Meeting, 2009
IEEE
5-8
International
978-1-4244-4894-4
IEEE Bipolar/BiCMOS Circuits and Technology Meeting, 2009
12-14/10/2009
IEEE
Capri
Italy
[en] SiGe ; Bipolar transistor ; BiCMOS
[en] An improved fully self-aligned SiGe:C HBT architecture featuring a single-step epitaxial collector-base process is described. An fMAX value of 400 GHz is reached by structural as well as intrinsic advancements made to the HBT device.