ORBi: Vandervorst Wilfried - Conformal doping of FINFET's : a fabrication and metrology challenge

Reference : Conformal doping of FINFET's : a fabrication and metrology challenge


	Document type :	Scientific congresses and symposiums : Unpublished conference
	Discipline(s) :	Engineering, computing & technology : Electrical & electronics engineering
	To cite this reference:	http://hdl.handle.net/2268/68738

Title :	Conformal doping of FINFET's : a fabrication and metrology challenge
Language :	English
Author, co-author :	Vandervorst, Wilfried [IMEC > > > >]
	Eyben, Pierre [IMEC > > > >]
	Mody, Jay [IMEC > > > >]
	Jurczak, Malgorzata [IMEC > > > >]
	Nguyen, Ngoc Duy [IMEC > > > >]
	Takeuchi, Shotaro [IMEC > > > >]
	Leys, Frederik [IMEC > > > >]
	Loo, Roger [IMEC > > > >]
	Caymax, Matty [IMEC > > > >]
	Everaert, Jean-Luc [IMEC > > > >]
Publication date :	2008
On invitation :	Yes
Audience :	International
Event name :	17th International Conference in Ion Implantation Technology
Event date :	8-13/6/2008
Event organizer :	Spansion, Texas Instruments, University of Illinois
Event place (city) :	Monterey
Event country :	USA
Keywords :	[en] Conformal doping ; FinFET
Target :	Researchers ; Professionals
Permalink :	http://hdl.handle.net/2268/68738

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	File	Commentary	Version	Size	Access
Open access	Vandervorst_Nguyen_IIT_2008.pdf		Author postprint	16.3 kB	View/Open

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