Unpublished conference/Abstract (Scientific congresses and symposiums)
Conformal doping of FINFET's : a fabrication and metrology challenge
Vandervorst, Wilfried; Eyben, Pierre; Mody, Jay et al.
200817th International Conference in Ion Implantation Technology
 

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Keywords :
Conformal doping; FinFET
Disciplines :
Electrical & electronics engineering
Author, co-author :
Vandervorst, Wilfried;  IMEC
Eyben, Pierre;  IMEC
Mody, Jay;  IMEC
Jurczak, Malgorzata;  IMEC
Nguyen, Ngoc Duy  ;  IMEC
Takeuchi, Shotaro;  IMEC
Leys, Frederik;  IMEC
Loo, Roger;  IMEC
Caymax, Matty;  IMEC
Everaert, Jean-Luc;  IMEC
Language :
English
Title :
Conformal doping of FINFET's : a fabrication and metrology challenge
Publication date :
2008
Event name :
17th International Conference in Ion Implantation Technology
Event organizer :
Spansion, Texas Instruments, University of Illinois
Event place :
Monterey, United States
Event date :
8-13/6/2008
By request :
Yes
Audience :
International
Available on ORBi :
since 12 August 2010

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