Reference : Conformal doping of FINFET's : a fabrication and metrology challenge
Scientific congresses and symposiums : Unpublished conference
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/68738
Conformal doping of FINFET's : a fabrication and metrology challenge
English
Vandervorst, Wilfried [IMEC > > > >]
Eyben, Pierre [IMEC > > > >]
Mody, Jay [IMEC > > > >]
Jurczak, Malgorzata [IMEC > > > >]
Nguyen, Ngoc Duy mailto [IMEC > > > >]
Takeuchi, Shotaro [IMEC > > > >]
Leys, Frederik [IMEC > > > >]
Loo, Roger [IMEC > > > >]
Caymax, Matty [IMEC > > > >]
Everaert, Jean-Luc [IMEC > > > >]
2008
No
Yes
International
17th International Conference in Ion Implantation Technology
8-13/6/2008
Spansion, Texas Instruments, University of Illinois
Monterey
USA
[en] Conformal doping ; FinFET
Researchers ; Professionals
http://hdl.handle.net/2268/68738

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