Reference : Vapor phase doping: an atomic layer deposition approach to n-type doping in classical ch...
Scientific congresses and symposiums : Unpublished conference
Physical, chemical, mathematical & earth Sciences : Physics
http://hdl.handle.net/2268/68720
Vapor phase doping: an atomic layer deposition approach to n-type doping in classical chemical vapor deposition epitaxy
English
Takeuchi, Shotaro [IMEC > > > >]
Nguyen, Ngoc Duy mailto [IMEC > > > >]
Leys, Frederik [IMEC > > > >]
Loo, Roger [IMEC > > > >]
Conard, Thierry [IMEC > > > >]
Vandervorst, Wilfried [IMEC > > > >]
Caymax, Matty [IMEC > > > >]
2008
Yes
International
8th International Conference on Atomic Layer Deposition (ALD)
29/6-2/7/2008
Technische Universiteit Eindhoven and IMEC
Bruges
Belgium
[en] Vapor phase doping ; Atomic layer epitaxy ; n-Type doping
Researchers ; Professionals
http://hdl.handle.net/2268/68720

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