Poster (Scientific congresses and symposiums)
Atomic layer doping of phosphorus and arsenic: experimental and atomistic modeling
Takeuchi, Shotaro; Yang, Lijun; Nguyen, Ngoc Duy et al.
20084th International Workshop on New Group IV Semiconductor Nanoelectronics
 

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Keywords :
Atomic layer epitaxy; Atomic layer doping; Phosphorus; Arsenic
Disciplines :
Physics
Author, co-author :
Takeuchi, Shotaro;  IMEC
Yang, Lijun;  IMEC
Nguyen, Ngoc Duy  ;  IMEC
Loo, Roger;  IMEC
Conard, Thierry;  IMEC
Pourtois, Geoffrey;  IMEC
Vandervorst, Wilfried;  IMEC
Caymax, Matty;  IMEC
Language :
English
Title :
Atomic layer doping of phosphorus and arsenic: experimental and atomistic modeling
Publication date :
2008
Event name :
4th International Workshop on New Group IV Semiconductor Nanoelectronics
Event organizer :
Tohoku University
Event place :
Sendai, Japan
Event date :
25-27/9/2008
Audience :
International
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since 12 August 2010

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