[en] This document proposes a formulation of the squeeze film air damping in micro-plates. The nonlinear Reynolds equation for compressible film is used to analyze the air pressure field, whereas a standard linear elastic model is used for the displacement field. The formulation is based on a finite element discretization of both the pressure and displacement fields. The coupled equations of motion are established and, for harmonic oscillations, we show that the resulting damping matrix depends on the frequency.
Disciplines :
Mechanical engineering Mathematics Physics
Author, co-author :
Bruls, Olivier ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Laboratoire des Systèmes Multicorps et Mécatroniques
Language :
English
Title :
Modelling of the squeeze film air damping in MEMS
Publication date :
May 2008
Publisher :
University of Liège
Collection name :
Internal Report, LTAS - Vibrations et Identification des Structures
