Reference : Modelling of the squeeze film air damping in MEMS

	Document type :	Reports : Internal report
	Discipline(s) :	Physical, chemical, mathematical & earth Sciences : Mathematics Physical, chemical, mathematical & earth Sciences : Physics Engineering, computing & technology : Mechanical engineering
	To cite this reference:	http://hdl.handle.net/2268/61696

Title :	Modelling of the squeeze film air damping in MEMS
Language :	English
Author, co-author :	Bruls, Olivier [Université de Liège - ULg > Département d'aérospatiale et mécanique > Laboratoire des Systèmes Multicorps et Mécatroniques >]
Publication date :	May-2008
Publisher :	University of Liège
Collection and collection volume :	Internal Report, LTAS - Vibrations et Identification des Structures
Keywords :	[en] Modelling ; squeeze film air damping ; MEMS
Abstract :	[en] This document proposes a formulation of the squeeze film air damping in micro-plates. The nonlinear Reynolds equation for compressible film is used to analyze the air pressure field, whereas a standard linear elastic model is used for the displacement field. The formulation is based on a finite element discretization of both the pressure and displacement fields. The coupled equations of motion are established and, for harmonic oscillations, we show that the resulting damping matrix depends on the frequency.
Target :	Researchers ; Professionals ; Students
Permalink :	http://hdl.handle.net/2268/61696

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