Reference : Quantitative accelerated life testing of MEMS accelerometers
Scientific journals : Article
Physical, chemical, mathematical & earth Sciences : Multidisciplinary, general & others
http://hdl.handle.net/2268/61318
Quantitative accelerated life testing of MEMS accelerometers
English
Bazu, Marius [IMT- Bucharest > National Institute for R&D in Microtechnologies > > >]
Gălăţeanu, Lucian [IMT - Bucharest > National Institute for R&D in Microtechnologies > > >]
Ilian, Virgil Emil [IMT - Bucharest > National Institute for R&D in Microtechnologies > > >]
Loicq, Jerôme mailto [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
Habraken, Serge mailto [Université de Liège - ULg > Département de physique > Optique - Hololab - CSL (Centre Spatial de Liège) >]
Collette, Jean-Paul [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
2007
sensors
7
11
2846
Yes
International
1424-8239
Bale
Switzerland
[en] reliability ; accelerometers ; MEMS ; Vibration ; tilting
[en] Quantitative Accelerated Life Testing (QALT) is a solution for assessing the
reliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shown
in this paper and an attempt to assess the reliability level for a batch of MEMS
accelerometers is reported. The testing plan is application-driven and contains combined
tests: thermal (high temperature) and mechanical stress. Two variants of mechanical stress
are used: vibration (at a fixed frequency) and tilting. Original equipment for testing at tilting
and high temperature is used. Tilting is appropriate as application-driven stress, because the
tilt movement is a natural environment for devices used for automotive and aerospace
applications. Also, tilting is used by MEMS accelerometers for anti-theft systems. The test
results demonstrated the excellent reliability of the studied devices, the failure rate in the
“worst case” being smaller than 10-7h-1.
Researchers ; Professionals ; Students ; General public ; Others
http://hdl.handle.net/2268/61318

File(s) associated to this reference

Fulltext file(s):

FileCommentaryVersionSizeAccess
Restricted access
sensors-07-02846[1].pdfPublisher postprint601.59 kBRequest copy

Bookmark and Share SFX Query

All documents in ORBi are protected by a user license.