ORBi: Bazu Marius - Quantitative accelerated life testing of MEMS accelerometers

Reference : Quantitative accelerated life testing of MEMS accelerometers


	Document type :	Scientific journals : Article
	Discipline(s) :	Physical, chemical, mathematical & earth Sciences : Multidisciplinary, general & others
	To cite this reference:	http://hdl.handle.net/2268/61318

Title :	Quantitative accelerated life testing of MEMS accelerometers
Language :	English
Author, co-author :	Bazu, Marius [IMT- Bucharest > National Institute for R&D in Microtechnologies > > >]
	Gălăţeanu, Lucian [IMT - Bucharest > National Institute for R&D in Microtechnologies > > >]
	Ilian, Virgil Emil [IMT - Bucharest > National Institute for R&D in Microtechnologies > > >]
	Loicq, Jerôme [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
	Habraken, Serge [Université de Liège - ULg > Département de physique > Optique - Hololab - CSL (Centre Spatial de Liège) >]
	Collette, Jean-Paul [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
Publication date :	2007
Journal title :	sensors
Volume :	7
Issue/season :	11
Pages :	2846
Audience :	International
ISSN :	1424-8239
City :	Bale
Country :	Switzerland
Keywords :	[en] reliability ; accelerometers ; MEMS ; Vibration ; tilting
Abstract :	[en] Quantitative Accelerated Life Testing (QALT) is a solution for assessing the reliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shown in this paper and an attempt to assess the reliability level for a batch of MEMS accelerometers is reported. The testing plan is application-driven and contains combined tests: thermal (high temperature) and mechanical stress. Two variants of mechanical stress are used: vibration (at a fixed frequency) and tilting. Original equipment for testing at tilting and high temperature is used. Tilting is appropriate as application-driven stress, because the tilt movement is a natural environment for devices used for automotive and aerospace applications. Also, tilting is used by MEMS accelerometers for anti-theft systems. The test results demonstrated the excellent reliability of the studied devices, the failure rate in the “worst case” being smaller than 10-7h-1.
Target :	Researchers ; Professionals ; Students ; General public ; Others
Permalink :	http://hdl.handle.net/2268/61318

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