ORBi: Bazu Marius - RELIABILITY ACCELERATED TESTING OF MEMS ACCCELEROMETERS

Reference : RELIABILITY ACCELERATED TESTING OF MEMS ACCCELEROMETERS


	Document type :	Scientific congresses and symposiums : Paper published in a journal
	Discipline(s) :	Physical, chemical, mathematical & earth Sciences : Multidisciplinary, general & others
	To cite this reference:	http://hdl.handle.net/2268/61316

Title :	RELIABILITY ACCELERATED TESTING OF MEMS ACCCELEROMETERS
Language :	English
Author, co-author :	Bazu, Marius [IMT - Bucharest > National Institute for R&D in Microtechnologies –IMT-Bucharest > > >]
	Gălăţeanu, Lucian [IMT- Bucharest > National Institute for R&D in Microtechnologies –IMT-Bucharest > > >]
	Ilian, Virgil Emil [IMT- Bucharest > National Institute for R&D in Microtechnologies –IMT-Bucharest > > >]
	Loicq, Jerôme [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
	Habraken, Serge [Université de Liège - ULg > Département de physique > Optique - Hololab - CSL (Centre Spatial de Liège) >]
	Collette, Jean-Paul [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
Publication date :	2007
Journal title :	IEEE Sensors Journal
Volume :	1
Pages :	103
Audience :	International
ISSN :	1530-437X
Event name :	IEEE CAS
Keywords :	[en] Accelerometers ; reliability ; accelerated testing ; vibration
Abstract :	[en] An attempt to assess the reliability of a batch of MEMS accelerometers is presented. The testing plan is application oriented and contains combined tests: thermal and mechanical stresses (two variants: vibration and tilting) were used. The results demonstrated the good reliability of the tested device, the failure rate being smaller than 6.10-8h-1.
Funders :	FP6
Target :	Researchers ; Professionals ; Students ; General public ; Others
Permalink :	http://hdl.handle.net/2268/61316

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