Reference : RELIABILITY ACCELERATED TESTING OF MEMS ACCCELEROMETERS
Scientific congresses and symposiums : Paper published in a journal
Physical, chemical, mathematical & earth Sciences : Multidisciplinary, general & others
http://hdl.handle.net/2268/61316
RELIABILITY ACCELERATED TESTING OF MEMS ACCCELEROMETERS
English
Bazu, Marius [IMT - Bucharest > National Institute for R&D in Microtechnologies –IMT-Bucharest > > >]
Gălăţeanu, Lucian [IMT- Bucharest > National Institute for R&D in Microtechnologies –IMT-Bucharest > > >]
Ilian, Virgil Emil [IMT- Bucharest > National Institute for R&D in Microtechnologies –IMT-Bucharest > > >]
Loicq, Jerôme mailto [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
Habraken, Serge mailto [Université de Liège - ULg > Département de physique > Optique - Hololab - CSL (Centre Spatial de Liège) >]
Collette, Jean-Paul [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
2007
IEEE Sensors Journal
1
103
Yes
International
1530-437X
IEEE CAS
[en] Accelerometers ; reliability ; accelerated testing ; vibration
[en] An attempt to assess the reliability of a batch of MEMS accelerometers is presented. The testing plan is application oriented and contains combined tests: thermal and mechanical stresses (two variants: vibration and tilting) were used.
The results demonstrated the good reliability of the tested device, the failure rate being smaller than 6.10-8h-1.
FP6
Researchers ; Professionals ; Students ; General public ; Others
http://hdl.handle.net/2268/61316

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