Reference : Effects of the geometrical dimensions on stress and strain of electrostatically actuated...
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Mechanical engineering
http://hdl.handle.net/2268/58458
Effects of the geometrical dimensions on stress and strain of electrostatically actuated MEMS resonators at pull-in and stiction positions
English
Pustan, Marius [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Golinval, Jean-Claude mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Rochus, Véronique mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
2010
EuroSimE 2010
No
Yes
International
[en] MEMS ; Pull-in
http://hdl.handle.net/2268/58458

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