Article (Scientific journals)
Portable x-ray fluorescence spectrometer for coating thickness measurement
Carapelle, Alain; Fleury-Frenette, Karl; Collette, Jean-Paul et al.
2007In Review of Scientific Instruments, 78 (12)
Peer Reviewed verified by ORBi
 

Files


Full Text
Portable x-ray fluorescence spectrometer for coating thickness.pdf
Publisher postprint (224.94 kB)
Download

All documents in ORBi are protected by a user license.

Send to



Details



Keywords :
XRF; coating; thickness
Abstract :
[en] A handheld x-ray spectrometer has been realized and tested. The purpose of the device is to measure the thickness of coated samples in the range of 1-1500 nm in an industrial environment. Accuracy of similar to 3% has been achieved in this range with a measurement time of 1 min. Automated software has been implemented to allow utilization by a nonspecialist operator. An automated calibration procedure, based on measurements of reference samples, is used. (C) 2007 American Institute of Physics.
Disciplines :
Physics
Author, co-author :
Carapelle, Alain  ;  Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Fleury-Frenette, Karl ;  Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Collette, Jean-Paul ;  Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Garnir, Henri-Pierre ;  Université de Liège - ULiège > Département de physique > Physique nucléaire, atomique et spectroscopie
Harlet, Philippe
Language :
English
Title :
Portable x-ray fluorescence spectrometer for coating thickness measurement
Publication date :
2007
Journal title :
Review of Scientific Instruments
ISSN :
0034-6748
eISSN :
1089-7623
Publisher :
American Institute of Physics, New York, United States - New York
Volume :
78
Issue :
12
Peer reviewed :
Peer Reviewed verified by ORBi
Available on ORBi :
since 26 January 2009

Statistics


Number of views
222 (30 by ULiège)
Number of downloads
1026 (6 by ULiège)

Scopus citations®
 
13
Scopus citations®
without self-citations
11
OpenCitations
 
15

Bibliography


Similar publications



Contact ORBi