Electrostatic field distortions,finite element method, perturbation method.; MEMS
Abstract :
[en] In this paper, a finite element (FE) procedure for modeling electrostatically actuated MEMS is presented. It concerns a perturbation method for computing electrostatic field distortions due to moving conductors. The computation is split in two steps. First, an unperturbed problem (in the absence of certain conductors) is solved with the conventional FE method in the complete domain. Second, a perturbation problem is solved in a reduced region with an additional conductor using the solution of the unperturbed problem as a source. When the perturbing region is close to the original source field, an iterative computation may be required. The developed procedure offers the advantage of solving sub-problems in reduced domains and consequently of benefiting from different problem-adapted meshes. This approach allows for computational efficiency by decreasing the size of the problem.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Boutaayamou, Mohamed ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE)
V Sabariego, Ruth ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE)
Dular, Patrick ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE)
Language :
English
Title :
A perturbation method for the 3D finite element modeling of electrostatically driven MEMS
Publication date :
2008
Journal title :
Sensors
ISSN :
1424-8220
eISSN :
1424-3210
Publisher :
Multidisciplinary Digital Publishing Institute (MDPI), Switzerland
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