Reference : A Micromechanical Sensor of Temperature Based on Surface Plasmons Resonance
Scientific journals : Article
Physical, chemical, mathematical & earth Sciences : Physics
http://hdl.handle.net/2268/34264
A Micromechanical Sensor of Temperature Based on Surface Plasmons Resonance
English
Hastanin, Juriy mailto [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
Renotte, Yvon mailto [Université de Liège - ULg > Département de physique > Département de physique >]
Habraken, Serge mailto [Université de Liège - ULg > Département de physique > Optique - Hololab - CSL (Centre Spatial de Liège) >]
23-Jul-2008
Sensors & Transducers Journal
96
9
8-17
Yes
International
1726-5479
[en] Surface plasmons ; Cantilever sensing ; MOEMS
[en] This paper reports a new concept of micromechanical sensors of temperature. The sensors
consist of a micro-cantilever transducer and optical readout means for monitoring cantilever
mechanical response using the surface plasmons resonance (SPR) phenomenon. This solution has the advantage of reducing the cantilever length due to an ultrahigh resolution of the optical readout means and, therefore a high signal-to-noise ratio can be achieved.
Physics Department of Université de Liège
http://hdl.handle.net/2268/34264

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