Dual Approach for Electromechanical Coupling in MEMS

In this paper we present an approach for the computation of
coupled electromechanical problems in micro-electromechanical
systems based on a vector potential formulation of the electrostatic
problem. This formulation is the dual of the scalar potential
approach commonly used in the literature. We present an
analytic derivation of the force computed using this dual method
based on the virtual work principle, and compare the primal and
dual approaches on the finite element solution of simple twodimensional
test-cases.