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Static and Dynamic experimental investigations of a micro-electromechanical cantilever in air and vacuum
Gutschmidt, Stefanie; Rochus, Véronique; Golinval, Jean-Claude
2009
 

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Abstract :
[en] The dynamic response of electro-mechanically actuated micro structures is governed by nonlinear effects which directly influence their performance. To date, most work in the field of micro/nano systems is done experimentally and documented theoretical research consists of nonlinear lumped-mass models as well as continuum mechanics approaches. Existing and codified computational tools for micro-electromechanical systems (MEMS) more and more penetrate the market of designers and fabrication of such devices. The present work is the experimental part of a bench-mark study of a selected microbeam structure investigated with aforementioned analytical and computational techniques and compared to experiments performed with a Polytec MSA400 analyzer. The emphasis of this benchmark study is put on the nonlinear dynamic behavior with respect to qualitative and quantitative explanations of the electro-mechanical actuation and damping mechanisms.
Disciplines :
Mechanical engineering
Author, co-author :
Gutschmidt, Stefanie;  University of Canterbury > Department of Mechanical Engineering
Rochus, Véronique ;  Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Golinval, Jean-Claude  ;  Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Language :
English
Title :
Static and Dynamic experimental investigations of a micro-electromechanical cantilever in air and vacuum
Publication date :
2009
Event name :
Proceedings of Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-systems EuroSime
Event place :
Delft, Netherlands
Audience :
International
Available on ORBi :
since 02 December 2009

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