Reference : A far infrared/terahertz micromechanical sensor based on surface plasmons resonance

	Document type :	Scientific congresses and symposiums : Paper published in a journal
	Discipline(s) :	Physical, chemical, mathematical & earth Sciences : Physics
	To cite this reference:	http://hdl.handle.net/2268/30229

Title :	A far infrared/terahertz micromechanical sensor based on surface plasmons resonance
Language :	English
Author, co-author :	Hastanin, Juriy [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
	Renotte, Yvon [Université de Liège - ULg > Département de physique > Département de physique >]
	Fleury-Frenette, Karl [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
	Defise, Jean-Marc [Université de Liège - ULg > > CSL : Direction générale - Satellites, missions et instruments spatiaux >]
	Habraken, Serge [Université de Liège - ULg > Département de physique > Optique - Hololab - CSL (Centre Spatial de Liège) >]
Publication date :	2008
Journal title :	Proceedings of SPIE
Volume :	7113
Special issue title :	Electro-Optical and Infrared Systems: Technology and Applications V
Audience :	International
Event name :	SPIE
Keywords :	[en] surface plasmons ; cantilever ; micromechanical sensors
Abstract :	[en] This paper describes a new concept related to the bolometric micromechanical sensors for detecting far IR and THz radiation. We believe that this concept permits a low cost and ease of fabrication of large bi-dimensional array of sensors with an enhanced signal-to-noise ratio. The micromechanical sensor comprises a thermo-sensitive bi-material (multimaterial) micro-cantilever beam with a selective absorber dedicated to far IR and THz radiation energy, and optical readout system based on surface plasmon resonance for detecting the bending of the micro-cantilever element. To increase the radiation detector sensitivity, the SPR phenomenon is used for cantilever deflection monitoring.
Permalink :	http://hdl.handle.net/2268/30229
Other URL :	http://spie.org/x648.html?product_id=799854

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