Reference : A far infrared/terahertz micromechanical sensor based on surface plasmons resonance
Scientific congresses and symposiums : Paper published in a journal
Physical, chemical, mathematical & earth Sciences : Physics
http://hdl.handle.net/2268/30229
A far infrared/terahertz micromechanical sensor based on surface plasmons resonance
English
Hastanin, Juriy mailto [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
Renotte, Yvon mailto [Université de Liège - ULg > Département de physique > Département de physique >]
Fleury-Frenette, Karl mailto [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
Defise, Jean-Marc mailto [Université de Liège - ULg > > CSL : Direction générale - Satellites, missions et instruments spatiaux >]
Habraken, Serge mailto [Université de Liège - ULg > Département de physique > Optique - Hololab - CSL (Centre Spatial de Liège) >]
2008
Proceedings of SPIE
7113
Electro-Optical and Infrared Systems: Technology and Applications V
Yes (verified by ORBi)
International
SPIE
[en] surface plasmons ; cantilever ; micromechanical sensors
[en] This paper describes a new concept related to the bolometric micromechanical sensors for detecting far IR and THz
radiation. We believe that this concept permits a low cost and ease of fabrication of large bi-dimensional array of sensors
with an enhanced signal-to-noise ratio. The micromechanical sensor comprises a thermo-sensitive bi-material (multimaterial)
micro-cantilever beam with a selective absorber dedicated to far IR and THz radiation energy, and optical
readout system based on surface plasmon resonance for detecting the bending of the micro-cantilever element. To
increase the radiation detector sensitivity, the SPR phenomenon is used for cantilever deflection monitoring.
http://hdl.handle.net/2268/30229
http://spie.org/x648.html?product_id=799854

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