Reference : Understanding of optical readout accuracy with micromechanical sensor cantilever moni...
Scientific journals : Article
Physical, chemical, mathematical & earth Sciences : Physics
http://hdl.handle.net/2268/30228
Understanding of optical readout accuracy with micromechanical sensor cantilever monitored by surface plasmon resonanc
English
Hastanin, Juriy mailto [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
Renotte, Yvon mailto [Université de Liège - ULg > Département de physique > Département de physique >]
Fleury-Frenette, Karl mailto [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
Defise, Jean-Marc mailto [Université de Liège - ULg > > CSL : Direction générale - Satellites, missions et instruments spatiaux >]
Habraken, Serge mailto [Université de Liège - ULg > Département de physique > Optique - Hololab - CSL (Centre Spatial de Liège) >]
2009
Optics Communications
Elsevier Science
282
3018-3023
Yes (verified by ORBi)
International
0030-4018
Amsterdam
The Netherlands
[en] This paper reports a concept of micromechanical sensing of environmental condition using the surface
plasmon resonance phenomenon. We calculate the resolution in the cantilever bending monitoring using
the transfer matrix numerical method. We show that the cantilever deflection can be monitored with a
resolution in the nanometer range. The SPs resonance behavior of the multilayer stack in the case of gold
cantilever is discussed. We believe that this concept permits a low cost and ease of fabrication for a large
bi-dimensional array of sensors with an enhanced signal-to-noise ratio.
http://hdl.handle.net/2268/30228

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