Reference : Influence of Adhesive Rough Surface Contact on Micro-Switches
Scientific journals : Article
Engineering, computing & technology : Multidisciplinary, general & others
Engineering, computing & technology : Mechanical engineering
http://hdl.handle.net/2268/25954
Influence of Adhesive Rough Surface Contact on Micro-Switches
English
Wu, Ling mailto [Université de Liège - ULG > Département d'aérospatiale et Mécanique > Vibrations > >]
Rochus, Véronique mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Noels, Ludovic mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3) >]
Golinval, Jean-Claude mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
1-Dec-2009
Journal of Applied Physics
American Institute of Physics
106
11
113502
Yes (verified by ORBi)
International
0021-8979
Melville
NY
[en] MEMS ; stiction ; rugosity
[en] Stiction is a major failure mode in micro electro-mechanical systems (MEMS).
Undesirable stiction, which results from contact between surfaces, threatens the
reliability of MEMS severely as it breaks the actuation function of MEMS switches
for example. Although it may be possible to avoid stiction by increasing restoring
forces using high spring constants, it follows that the actuation voltage has also to be
increased significantly, which reduces the efficiency. In our research, an
electrostatic-structural analysis is performed to estimate the proper design range of the
equivalent spring constant which is the main factor of restoring force in MEMS
switches. The upper limit of equivalent spring constant is evaluated based on the
initial gap width, the dielectric thickness, and the expected actuation voltage. The
lower limit is assessed on the value of adhesive forces between the two contacting
rough surfaces. The MEMS devices studied here are assumed to work in a dry
environment. In these operating conditions only the Van der Waals forces have to be
considered for adhesion. A statistical model is used to simulate the rough surface, and
the Maugis’s model is combined with Kim’s expansion to calculate adhesive forces. In
the resulting model, the critical value of the spring stiffness depends on the material
and surface properties, such as the elastic modulus, surface energy and surface
roughness. The aim of this research is to propose simple rules for design purposes.
project COROMIS, "First Postdoc Project 2007" funded by the Walloon Region of Belgium. ; Fonds de la Recherche Scientifique (Communauté française de Belgique) - F.R.S.-FNRS
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/25954
10.1063/1.3260248
http://link.aip.org/link/?JAP/106/113502
Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics

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