Correlation of Experimental and Numerical Results on Electrostatically Actuated Micro-Beams

The aim of this paper is to validate numerical simula-
tions of electromechanical coupling in micro-structures
using some experimental results. The micro-structures
studied here consist in a micro-bridge and two cantilever
micro-beams. Multi-physics models of micro-electro-
mechanical systems (MEMS) based on the ¯nite ele-
ment method (FEM) are used to model the strongly
coupled electro-mechanical interactions and to perform
static analyses taking into account large displacements.
In all the cases treated here the numerical results are in
very good agreement with the experimental results.