Reference : A Perturbation Finite Element Method for Modeling Electrostatic MEMS without Remeshing
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/23457
A Perturbation Finite Element Method for Modeling Electrostatic MEMS without Remeshing
English
Boutaayamou, Mohamed mailto [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Capteurs et systèmes de mesures électriques >]
V Sabariego, Ruth mailto [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE) >]
Dular, Patrick mailto [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE) >]
2008
Proceedings of the 9th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE2008)
Yes
No
International
978-1-4244-2127-5
Freiburg
Germany
9th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE2008)
April
Freiburg
Germany
[en] This paper deals with the coupled electrostatic- mechanical analysis of electrostatically actuated MEMS. An iterative perturbation procedure in conjunction with the finite element method is used to solve the coupled problem without the need of remeshing the whole electric domain. The method offers the advantage of overcoming degenerated finite elements in the mesh of some electric regions where the deflection of the MEMS moving parts is critical. The actuation of such systems is achieved by applying either an electric voltage or a global charge.
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/23457
10.1109/ESIME.2008.4525012
http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=4525012

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