ORBi: Boutaayamou Mohamed - A Perturbation Finite Element Method for Modeling Electrostatic MEMS without Remeshing

Reference : A Perturbation Finite Element Method for Modeling Electrostatic MEMS without Remeshing


	Document type :	Scientific congresses and symposiums : Paper published in a book
	Discipline(s) :	Engineering, computing & technology : Electrical & electronics engineering
	To cite this reference:	http://hdl.handle.net/2268/23457

Title :	A Perturbation Finite Element Method for Modeling Electrostatic MEMS without Remeshing
Language :	English
Author, co-author :	Boutaayamou, Mohamed [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Capteurs et systèmes de mesures électriques >]
	V Sabariego, Ruth [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE) >]
	Dular, Patrick [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE) >]
Publication date :	2008
Main document title :	Proceedings of the 9th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE2008)
On invitation :	No
Audience :	International
ISBN :	978-1-4244-2127-5
City :	Freiburg
Country :	Germany
Event name :	9th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE2008)
Event date :	April
Event place (city) :	Freiburg
Event country :	Germany
Abstract :	[en] This paper deals with the coupled electrostatic- mechanical analysis of electrostatically actuated MEMS. An iterative perturbation procedure in conjunction with the finite element method is used to solve the coupled problem without the need of remeshing the whole electric domain. The method offers the advantage of overcoming degenerated finite elements in the mesh of some electric regions where the deflection of the MEMS moving parts is critical. The actuation of such systems is achieved by applying either an electric voltage or a global charge.
Target :	Researchers ; Professionals ; Students
Permalink :	http://hdl.handle.net/2268/23457
DOI :	10.1109/ESIME.2008.4525012
Other URL :	http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=4525012

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