Reference : Modeling and Uncertainty Quantification of Thermoelastic Damping in Micro-Resonators

	Document type :	Diverses speeches and writings : Conference given outside the academic context
	Discipline(s) :	Engineering, computing & technology : Mechanical engineering
	To cite this reference:	http://hdl.handle.net/2268/22851

Title :	Modeling and Uncertainty Quantification of Thermoelastic Damping in Micro-Resonators
Language :	English
Author, co-author :	Lepage, Séverine [Université de Liège - ULG > > LTAS - Vibrations and Identification of Structures > >]
	Golinval, Jean-Claude [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Publication date :	Feb-2006
Audience :	International
Event name :	International Modal Analysis Conference (IMAC XXIV)
Event date :	du 30 janvier 2006 au 2 février 2006
Event organizer :	Society of Experimental Mechanics
Event place (city) :	St Louis
Event country :	Missouri
Abstract :	[en] In the design of micro-electromechanical systems (MEMS) such as micro-resonators, dissipation mechanisms may have detrimental effects on the quality factor, which is directly related to the response amplitude of the system that is excited at its natural frequency. One of the major dissipation phenomena to be considered in such micro-systems is thermoelastic damping. Hence, the performance of such MEMS is directly related to their thermoelastic quality factor which has to be predicted accurately. Moreover, the performance of MEMS depends on manufacturing processes which may cause substantial uncertainty in the geometry and in the material properties of the device. The reliability of MEMS devices is affected by the inability to accurately predict the behavior of the system due to the presence of these uncertainties. The aim of this paper is to provide a framework to account for uncertainties in the finite element analysis. Particularly, the influence of uncertainties on the performance of a micro-beam is studied using Monte- Carlo simulations. A random field approach is used to characterize the variation of the material as well as the geometric properties. Their effects on the thermoelastic quality factor of a micro-beam are studied.
Target :	Researchers ; Professionals ; Students
Permalink :	http://hdl.handle.net/2268/22851

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