|Reference : Finite Element Modeling of Electro-Mechanical Coupling in Capacitive Micro-Systems|
|Diverse speeches and writings : Conference given outside the academic context|
|Physical, chemical, mathematical & earth Sciences : Mathematics|
Engineering, computing & technology : Mechanical engineering
|Finite Element Modeling of Electro-Mechanical Coupling in Capacitive Micro-Systems|
|Rochus, Véronique [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]|
|Rixen, Daniel [TU Delft > > > >]|
|Golinval, Jean-Claude [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]|
|8th Internationale Conference on Modeling and Simulation of Microsystems|
|[en] Electro-mechanical coupling, Finite Ele- ment, Nonlinearity, Micro-Systems, Pull-in.|
|[en] In this paper advanced multi-physics simulations of micro-electro-mechanical systems (MEMS) are used to investigate their dynamic behaviour. The strong coupled electro-mechanical Finite Element (FE) formulation is used to model the electro-mechanical interactions and to perform modal and transient analysis taking into account large deformation e®ects. The application examples simulate two micro-resonators consisting in a clamped-clamped beam suspended over a substrate (the lower electrode). When a voltage is applied between the beam and the substrate, electrostatic forces appear which force the beam to bend. When the applied voltage is increased up to the pull-in limit, the electrostatic force becomes dominant and the plates stick together.
The pull-in voltage is an essential design parameters in capacitive micro-systems. Here we also de¯ne a new design parameter describing the limit dynamic behaviour, namely the dynamic pull-in voltage.
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