Reference : Finite Element Modeling of Electro-Mechanical Coupling in Capacitive Micro-Systems

	Document type :	Diverses speeches and writings : Conference given outside the academic context
	Discipline(s) :	Physical, chemical, mathematical & earth Sciences : Mathematics Engineering, computing & technology : Mechanical engineering
	To cite this reference:	http://hdl.handle.net/2268/22706

Title :	Finite Element Modeling of Electro-Mechanical Coupling in Capacitive Micro-Systems
Language :	English
Author, co-author :	Rochus, Véronique [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
	Rixen, Daniel [TU Delft > > > >]
	Golinval, Jean-Claude [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Publication date :	2005
Page number :	4
Audience :	International
Event name :	8th Internationale Conference on Modeling and Simulation of Microsystems
Event place (city) :	Anaheim, California
Event country :	USA
Keywords :	[en] Electro-mechanical coupling, Finite Ele- ment, Nonlinearity, Micro-Systems, Pull-in.
Abstract :	[en] In this paper advanced multi-physics simulations of micro-electro-mechanical systems (MEMS) are used to investigate their dynamic behaviour. The strong coupled electro-mechanical Finite Element (FE) formulation is used to model the electro-mechanical interactions and to perform modal and transient analysis taking into account large deformation e®ects. The application examples simulate two micro-resonators consisting in a clamped-clamped beam suspended over a substrate (the lower electrode). When a voltage is applied between the beam and the substrate, electrostatic forces appear which force the beam to bend. When the applied voltage is increased up to the pull-in limit, the electrostatic force becomes dominant and the plates stick together. The pull-in voltage is an essential design parameters in capacitive micro-systems. Here we also de¯ne a new design parameter describing the limit dynamic behaviour, namely the dynamic pull-in voltage.
Target :	Researchers ; Professionals ; Students
Permalink :	http://hdl.handle.net/2268/22706

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