Reference : Evaluation of Tribo-Mechanical Properties of Thin Films Using Atomic Force Microscope
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Materials science & engineering
http://hdl.handle.net/2268/22560
Evaluation of Tribo-Mechanical Properties of Thin Films Using Atomic Force Microscope
English
Pustan, Marius [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Rochus, Véronique mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Wu, Ling mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Noels, Ludovic mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3) >]
Golinval, Jean-Claude mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
2010
First European Conference on Nanofilm ECNF2010
7 pages
No
No
International
First European Conference on Nanofilm ECNF2010
March 22-25, 2010
Liège
Belgium
[en] Experimental investigations of mechanical and tribological properties of thin films using an atomic force microscope and its combination with nanoidentation are presented in this paper. The normal mode of an atomic force microscope is used to measure the stiffness and hardness of thin films which are tribologically characterized by roughness, nano-scale adhesion forces and friction forces. The friction forces are measured using the lateral force mode of atomic force microscope. In order to measure the adhesion forces of thin films, spectroscopy in point with atomic force microscope was performed. Direct measurement of tribological and mechanical behaviour of thin films is important to increase the lifetime of microstructures which use thin films for friction and stiction reduction of microsystems.
Fonds de la Recherche Scientifique (Communauté française de Belgique) - F.R.S.-FNRS
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/22560

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