[en] Experimental investigations of mechanical and tribological properties of thin films using an atomic force microscope and its combination with nanoidentation are presented in this paper. The normal mode of an atomic force microscope is used to measure the stiffness and hardness of thin films which are tribologically characterized by roughness, nano-scale adhesion forces and friction forces. The friction forces are measured using the lateral force mode of atomic force microscope. In order to measure the adhesion forces of thin films, spectroscopy in point with atomic force microscope was performed. Direct measurement of tribological and mechanical behaviour of thin films is important to increase the lifetime of microstructures which use thin films for friction and stiction reduction of microsystems.
Disciplines :
Materials science & engineering
Author, co-author :
Pustan, Marius ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Rochus, Véronique ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Wu, Ling ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Noels, Ludovic ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Golinval, Jean-Claude ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Language :
English
Title :
Evaluation of Tribo-Mechanical Properties of Thin Films Using Atomic Force Microscope
Publication date :
2010
Event name :
First European Conference on Nanofilm ECNF2010
Event place :
Liège, Belgium
Event date :
March 22-25, 2010
Audience :
International
Main work title :
First European Conference on Nanofilm ECNF2010
Pages :
7 p.
Funders :
F.R.S.-FNRS - Fonds de la Recherche Scientifique [BE]
