Reference : Prediction of Stiction in Microswitch Systems
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Mechanical engineering
Engineering, computing & technology : Materials science & engineering
http://hdl.handle.net/2268/22181
Prediction of Stiction in Microswitch Systems
English
Wu, Ling mailto [Université de Liège - ULG > Département d'Aérospatiale et Mécanique > LTAS - Vibrations > >]
Rochus, Véronique mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Noels, Ludovic mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3) >]
Golinval, Jean-Claude mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
2010
EUROSIME 2010
Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE), 2010 11th International Conference on
4 pages
No
No
International
978-1-4244-7026-6
EuroSimE 2010
April 26 -28, 2010
Bordeaux
France
[en] Stiction is a major failure mode of MEMS as microscopic structures tend to adhere to each other when their surfaces enter into contact. Although increasing the restoring forces of switch devices could overcome the stiction effect, this is not practical, as in turn, it also
increases the actuation voltage. Therefore stiction prediction is important to be considered when designing micro- and nano- devices.
In this paper, the numerical prediction of stiction for capacitive MEMS switches is considered. Toward this end, a micro-adhesive-contact law is derived from previous work and combined with a finite-element model.
Fonds de la Recherche Scientifique (Communauté française de Belgique) - F.R.S.-FNRS
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/22181
10.1109/ESIME.2010.5464599
http://dx.doi.org/10.1109/ESIME.2010.5464599
2010 (c) IEEE

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