ORBi: Wu Ling - Prediction of Stiction in Microswitch Systems

Reference : Prediction of Stiction in Microswitch Systems


	Document type :	Scientific congresses and symposiums : Paper published in a book
	Discipline(s) :	Engineering, computing & technology : Mechanical engineering Engineering, computing & technology : Materials science & engineering
	To cite this reference:	http://hdl.handle.net/2268/22181

Title :	Prediction of Stiction in Microswitch Systems
Language :	English
Author, co-author :	Wu, Ling [Université de Liège - ULG > Département d'Aérospatiale et Mécanique > LTAS - Vibrations > >]
	Rochus, Véronique [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
	Noels, Ludovic [Université de Liège - ULg > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3) >]
	Golinval, Jean-Claude [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Publication date :	2010
Main document title :	EUROSIME 2010
Collection and collection volume :	Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE), 2010 11th International Conference on
Pages :	4 pages
Peer reviewed :	No
On invitation :	No
Audience :	International
ISBN :	978-1-4244-7026-6
Event name :	EuroSimE 2010
Event date :	April 26 -28, 2010
Event place (city) :	Bordeaux
Event country :	France
Abstract :	[en] Stiction is a major failure mode of MEMS as microscopic structures tend to adhere to each other when their surfaces enter into contact. Although increasing the restoring forces of switch devices could overcome the stiction effect, this is not practical, as in turn, it also increases the actuation voltage. Therefore stiction prediction is important to be considered when designing micro- and nano- devices. In this paper, the numerical prediction of stiction for capacitive MEMS switches is considered. Toward this end, a micro-adhesive-contact law is derived from previous work and combined with a finite-element model.
Funders :	Fonds de la Recherche Scientifique (Communauté française de Belgique) - F.R.S.-FNRS
Target :	Researchers ; Professionals ; Students
Permalink :	http://hdl.handle.net/2268/22181
DOI :	10.1109/ESIME.2010.5464599
Other URL :	http://dx.doi.org/10.1109/ESIME.2010.5464599
Mentions required by the publisher for OA :	2010 (c) IEEE

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