Article (Scientific journals)
Propagation of material and surface profile uncertainties on MEMS micro-resonators using a stochastic second-order computational multi-scale approach
Lucas, Vincent; Golinval, Jean-Claude; Voicu, Rodica et al.
2017In International Journal for Numerical Methods in Engineering, 111 (1), p. 26-68
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This is the submitted version of the paper "Propagation of material and surface profile uncertainties on MEMS micro-resonators using a stochastic second-order computational multi-scale approach, International Journal for Numerical Methods in Engineering VOL 111, PAGE 28-68, 10.1002/nme.5452" which has been published in final form on URL 10.1002/nme.5452


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Keywords :
Second-order multi-scale; Stochastic; Plate finite elements; Polycrystalline; Roughness; Resonance frequency; CECI
Abstract :
[en] This paper aims at accounting for the uncertainties due to material structure and surface topology of microbeams in a stochastic multiscale model. For micro-resonators made of anisotropic polycrystalline materials, micro-scale uncertainties are due to the grain size, grain orientation, and to the surface profile. First, microscale realizations of stochastic volume elements (SVEs) are obtained based on experimental measurements. To account for the surface roughness, the SVEs are defined as a volume element having the same thickness as the MEMS, with a view to the use of a plate model at the structural scale. The uncertainties are then propagated up to an intermediate scale, the meso-scale, through a second-order homogenization procedure.From the meso-scale plate resultant material property realizations, a spatially correlated random field of the in plane, out of plane, and cross resultant material tensors can be characterized. Owing to this characterized random field, realizations of MEMS-scale problems can be defined on a plate finite element model. Samples of the macro-scale quantity of interest can then be computed by relying on a Monte-Carlo simulation procedure. As a case study, the resonance frequency of MEMS micro-beams is investigated for different uncertainty cases, such as grain preferred orientations and surface roughness effects.
Disciplines :
Materials science & engineering
Mechanical engineering
Author, co-author :
Lucas, Vincent ;  Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Golinval, Jean-Claude  ;  Université de Liège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Voicu, Rodica;  National Institute for R& D in Microtechnologies - IMT Bucharest
Danila, Mihai;  National Institute for R& D in Microtechnologies - IMT Bucharest
Gravila, Raluca;  National Institute for R& D in Microtechnologies - IMT Bucharest
Muller, Raluca;  National Institute for R& D in Microtechnologies - IMT Bucharest
Dinescu, Adrian;  National Institute for R& D in Microtechnologies - IMT Bucharest
Noels, Ludovic  ;  Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Wu, Ling ;  Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Language :
English
Title :
Propagation of material and surface profile uncertainties on MEMS micro-resonators using a stochastic second-order computational multi-scale approach
Publication date :
06 July 2017
Journal title :
International Journal for Numerical Methods in Engineering
ISSN :
0029-5981
eISSN :
1097-0207
Publisher :
Wiley, Chichester, United Kingdom
Volume :
111
Issue :
1
Pages :
26-68
Peer reviewed :
Peer Reviewed verified by ORBi
Name of the research project :
3SMVIB: The research has been funded by the Walloon Region under the agreement no 1117477 (CT-INT 2011-11-14) and by the Romanian UEFISCDI Agency contract ERA-NET MNT no 7-063/2012 (20122015) in the context of the ERA-NET MNT framework; Computational resources have been provided by the supercomputing facilities of the Consortium des Equipements de Calcul Intensif en Federation Wallonie Bruxelles (CECI) funded by the Fond de la Recherche Scientifique de Belgique (FRS-FNRS).
Funders :
Service public de Wallonie : Direction générale opérationnelle de l'économie, de l'emploi et de la recherche - DG06
F.R.S.-FNRS - Fonds de la Recherche Scientifique [BE]
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