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| Reference : Non-conforming element for accurate modelling of MEMS |
| Scientific journals : Article | |||
| Physical, chemical, mathematical & earth Sciences : Physics Engineering, computing & technology : Mechanical engineering Physical, chemical, mathematical & earth Sciences : Mathematics | |||
| http://hdl.handle.net/2268/19943 | |||
| Non-conforming element for accurate modelling of MEMS | |
| English | |
Rochus, Véronique  [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >] | |
| Rixen, Daniel J. [TU-Delft, Faculty of Design, Engineering and Production, Engineering Mechanics–Dynamics, Mekelweg 2, Delft 2628 CD, The Netherlands > > > > > >] | |
| Golinval, Jean-Claude [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >] | |
| Jul-2007 | |
| Finite Elements in Analysis & Design | |
| Elsevier Science Bv | |
| 43 | |
| 10 | |
| 749-756 | |
| International | |
| 0168-874X | |
| Amsterdam | |
| [en] MEMS ; electro-mechanical coupling ; non-conforming elements ; finite element modelling ; non-linear structural analysis | |
| [en] In this work different modelling techniques are investigated to simulate the dynamic behaviour of slender structures on which electrostatic forces are acting. In particular, non-conforming elements are tested to model micro- mechanical devices (or MEMS) having a very large aspect ratio. These elements are constructed on linear shape functions enriched by internal second-order polynomials. As a consequence the element compatibility is not exactly satisfied, but such elements can efficiently model beam- or shell-like structures with a small number of degrees of freedom. The advantage of non-conforming elements compared to shell or beam elements is that they are volume elements and can therefore easily be combined with other volume finite elements. For micro-mechanical systems the structure must be coupled to the electrostatic domain with the so-called electro-mechanical elements that solve for the electrostatic potential and generate the electrostatic forces. This paper shows that constructing coupled electro-mechanical models for high aspect ratio systems is then greatly simplified when non-conforming finite elements are used. The theory is presented for small deformations and also for large displacements where geometric non-linearities must be accounted for. The elements proposed in this paper are based on non-conforming formulations published earlier. The efficiency of the non-conforming approach combined with specific electro-mechanical elements is highlighted in the analysis of two simple MEMS for which the pull-in voltage is computed. (C) 2007 Elsevier B.V. All rights reserved. | |
| Researchers ; Professionals ; Students | |
| http://hdl.handle.net/2268/19943 | |
| 10.1016/j.finel.2007.03.006 |
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