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A Study Of Dry Stiction Phenomenon In MEMS Using A Computational Stochastic Multi-scale Methodology
Hoang Truong, Vinh; Wu, Ling; Paquay, Stéphane et al.
2016In EuroSimE 2016 in Montpellier
 

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Keywords :
Stiction; van der Waals; MEMS; Multi-scale; Stochastic
Abstract :
[en] This work studies the uncertainties of the adhesive contact problems for reduced size structures, e.g. the stiction failure of microelectromechanical systems (MEMS). In MEMS, because of the large surface to volume ratio, the surfaces forces, such as van der Waals forces and capillary forces, are dominant in comparison with the body forces. As these force magnitudes strongly depend on the contact distance, when the two contacting surfaces are rough, the contact distances vary, and the physical contact areas are limited at the highest asperities of the contacting surfaces. Therefore, the adhesive contact forces between two rough surfaces can suffer from a scatter, and the involved structural behaviors can be indeterministic. To numerically predict the probability behaviors of structures involving adhesion in dry environments, in this paper, a computational stochastic model-based multi-scale method developed by the authors is applied. The effects of van der Waals is studied and compared with experimental data as well as with the effects of capillary forces.
Disciplines :
Mechanical engineering
Materials science & engineering
Author, co-author :
Hoang Truong, Vinh ;  Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Wu, Ling ;  Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Paquay, Stéphane;  Open Engineering SA
Golinval, Jean-Claude  ;  Université de Liège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Arnst, Maarten ;  Université de Liège > Département d'aérospatiale et mécanique > Computational and stochastic modeling
Noels, Ludovic  ;  Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Language :
English
Title :
A Study Of Dry Stiction Phenomenon In MEMS Using A Computational Stochastic Multi-scale Methodology
Publication date :
19 April 2016
Event name :
2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Event organizer :
IEEE
Event place :
Montpellier, France
Event date :
17-20th April 2016
Audience :
International
Main work title :
EuroSimE 2016 in Montpellier
Publisher :
IEEE
Collection name :
2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Pages :
4
Name of the research project :
3SMVIB: The research has been funded by the Walloon Region under the agreement no 1117477 (CT-INT 2011-11-14) in the context of the ERA-NET MNT framework.
Funders :
FRIA - Fonds pour la Formation à la Recherche dans l'Industrie et dans l'Agriculture [BE]
Service public de Wallonie : Direction générale opérationnelle de l'économie, de l'emploi et de la recherche - DG06
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