Pyramidal micromirrors for microsystems and atom chips

[en] Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micromirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into micro-optoelectromechanical systems and atom chips. We have shown that structures of this shape can be used to laser-cool and hold atoms in a magneto-optical trap.

Disciplines :

Electrical & electronics engineering

Author, co-author :

Trupke, Michael

Ramirez-Martinez, Fernando

Curtis, E. A.

Ashmore, J. P.

Eriksson, S.

Hinds, Edward A.

Moktadir, Zakaria

Gollasch, Carsten O.

Kraft, Michaël ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Vijaya Prakash, G.

Baumberg, J. J.

Language :

English

Title :

Pyramidal micromirrors for microsystems and atom chips

Publication date :

2006

Journal title :

Applied Physics Letters

ISSN :

0003-6951

eISSN :

1077-3118

Publisher :

American Institute of Physics, United States - New York

Volume :

Issue :

Pages :

071116-071116-3

Peer reviewed :

Peer Reviewed verified by ORBi

Additional URL :

http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=4821382

Available on ORBi :

since 17 May 2016

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Bibliography

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