[en] Micromachined inertial sensors that have been incorporated in sigma-delta force-feedback loops have been proven to improve linearity, dynamic range, and bandwidth, and also provide a direct digital output. Previous work mainly focused on using the sensing element only to form a second-order single-loop sigma-delta modulator (SigmaDeltaM); however, the advantages of higher order single-loop electromechanical SigmaDeltaM have not been fully explored. High-performance inertial sensors require higher signal-to-quantization noise ratio (SQNR). This paper presents topologies for higher order single-loop electromechanical SigmaDeltaM with optimal stable coefficients that lead to a better SQNR. The topologies have good immunity to fabrication tolerances, which was verified by Monte Carlo analysis. The topologies are applicable not only to accelerometers but also to other inertial sensors such as gyroscopes.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Dong, Yufeng
Kraft, Michaël ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Redman-White, William
Language :
English
Title :
Higher order noise-shaping filters for high-performance micromachined accelerometers
Publication date :
2007
Journal title :
IEEE Transactions on Instrumentation and Measurement
ISSN :
0018-9456
eISSN :
1557-9662
Publisher :
Institute of Electrical and Electronics Engineers, United States - New York
W. Henrion, L. DiSanza, M. Ip, S. Terry, and H. Jerman, "Wide dynamic range direct digital accelerometer," in Proc. IEEE Solid-State Sens., Actuator Workshop, Jun. 1990, pp. 153-157.
M. A. Lemkin and B. E. Boser, "A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics," IEEE J. Solid-State Circuits, vol. 34, no. 4, pp. 456-468, Apr. 1999.
V. P. Petkov and B. E. Boser, "A fourth-order ∑Δ interface for micromachined inertial sensors," in Proc. IEEE ISSCC, 2004, pp. 320-321.
T. Smith, O. Nys, M. Chevroulet, Y. DeCoulon, and M. Degrauwe, "A 15 b electromechanical sigma-delta converter for acceleration measurements," in Proc. IEEE ISSCC, Feb. 1994, pp. 160-161.
T. Kajita, U.-K. Moon, and G. C. Temes, "A two-chip interface for a MEMS accelerometer," IEEE Trans. Instrum. Meas., vol. 51, no. 4, pp. 853-858, Aug. 2002.
M. Kraft, W. Redman-White, and M. E. Mokhtari, "Closed loop micromachined inertial sensors with higher order ∑ΔM modulators," in Proc. 4th Conf. Model. Simul. Microsyst., Mar. 2001, pp. 104-107.
L. Breems and J. H. Huijsing, Continuous-Time Sigma-Delta Modulation for A/D Conversion in Radio Receivers. Norwell, MA: Kluwer, 2001.
S. N. Norsworth, R. Schreier, and C. Temes, Delta-Sigma Data Converters, Theory, Design, and Simulation. Piscataway, NJ: IEEE Press, 1997.
R. Schreier, "An empirical study of high-order single-bit delta-sigma modulators," IEEE Trans. Circuits Syst. II, vol. 40, no. 8, pp. 461-466, Aug. 1993.
P. Malcovati, S. Brigati, F. Francesconi, F. Maloberti, P. Cusinato, and A. Baschirotto, "Behavioral modeling of switched-capacitor sigma-delta modulators," IEEE Trans. Circuits Syst. I, vol. 50, no. 3, pp. 352-364, Mar. 2003.
A. Marques, V. Peluso, M. S. Steyaert, and W. M. Sansen, "Optimal parameters for ∑Δ modulators topologies," IEEE Trans. Circuits Syst. II, vol. 45, no. 9, pp. 1232-1241, Sep. 1998.
Y. Dong, M. Kraft, C. Gollasch, and W. Redman-White, "A high-performance accelerometer with fifth-order sigma-delta modulator," J. Micromech. Microeng., vol. 15, no. 7, pp. S22-S29, Jul. 2005.
Z.-M. Lin and W.-H. Sheu, "A generic multiple-feedback architecture and method for the design of high-order ∑Δ modulators," IEEE Trans. Circuits Syst. II, vol. 49, no. 7, pp. 465-473, Jul. 2002.
T.-H. Kuo, K.-D. Chen, and J.-R. Chen, "Automatic coefficients design for high-order sigma-delta modulators," IEEE Trans. Circuits Syst. II, vol. 46, no. 1, pp. 6-15, Jan. 1999.
Y. Dong, M. Kraft, and W. Redman-White, "Relaxation of fabrication tolerances of micromachined inertial sensors using high order electromechanical sigma-delta modulators," in Proc. MME Conf., Southampton, U.K., Sep. 2006, pp. 33-36.
Y. Dong, M. Kraft, and W. Redman-White, "Force feedback linearization for higher-order electromechanical sigma-delta modulators," J. Micromech. Microeng., vol. 16, no. 6, pp. S54-S60, Jun. 2006.
